Parker: Linear Servo Motor Driven Stages (MX80L Series)

Miniaturization of fiber optics, photonics, electronics and biomedical processes has driven the need for smaller and more efficient positioners. Parker’s MX80 miniature stage, the smallest linear servomotor driven positioner in the industry, is loaded with high-performance features for both rapid linear translation and precise positioning of lighter loads in small work envelopes. Designed for today’s 24/7 production demands, the MX80 has redefined “high-throughput automation” in the world of miniature
positioners.

Features
• Miniature size
• 5 g acceleration
• Fast settling
• Submicron precision
• High velocity (2 m/sec.)
• Multi-axis platform

Attributes
• Low profile miniature size - (25 mm high X 80 mm wide)
• Linear servo motor drive
• Six linear encoder resolutions (0.01 μm to 5.0 μm)
• 25, 50, 100, 150 and 200 mm travels
• Cross Roller bearing (zero cage creep design)
• Precision or standard grade
• Cleanroom and low ESD options
• Fully adjustable home and limit sensors
• Dowel holes for repeatable mounting of payload
• Master reference surface to travel path
• “Plug-in” intelligent drive
• Pneumatic z-axis counterbalance
• No moving cables

High Performance in a Small Package
While the MX80 is small in size, it is large on performance and reliability. All key components are “built-in” – residing within the body of the stage to provide a clean looking, reliable, unobstructed package. At the heart of the MX80 is an innovative non-contact linear servo motor (patent pending). This direct drive motor has been optimized for force, speed, and acceleration, to deliver outstanding performance and response. A high-precision non-contact linear encoder provides submicron resolution, repeatability and accuracy.

Selectable resolutions range from 10 nanometers to 5 microns. Precision ground cross roller bearing sets with a “zero cage creep” feature provide extremely smooth, precise linear translation. Digital Hall effect travel limit and home sensors are conveniently designed into the unit for easy adjustment over the entire travel of the stage. Although there are no moving cables, a meter of high-flex cabling is included and wired directly into the units. This high-flex cabling addresses cable flexing concerns associated with the second or third axis in multi-axis system.

Zero Cage Creep Feature
High acceleration and smooth translation are both desired attributes in a linear-motor stage. The cross roller bearing system found in the MX80 provides extremely smooth linear translation, and with an anti-cage creep
design, operates very well in high acceleration applications. This design employs a rack and pinion feature within the bearing races to eliminate bearing creep. As a result, the MX80 performs well, even at 5g acceleration.

Tooling Features
Innovative tooling features make mounting and alignment much quicker and easier.
• A hardened steel master reference surface is provided along the side of the stage to allow fixturing or other tooling elements to be precisely aligned with the actual travel path.
• Two dowel pin holes are provided on the carriage top and base for repeatable mounting of positioner or tooling.

MX80LP Precision Series

• 4 g acceleration
• Repeatability to ±0.4 μm
• Straightness 4 μ
• Steel body construction
• Precision ground mounting and bearing surfaces
• Electroless nickel protective finish

Precision grade models are designed for high-performance applications requiring the highest degree of positioning accuracy. They offer a steel body design with precisely ground mounting surfaces & bearing ways. They include higher resolution linear encoders, and are slope corrected, laser tested and certified for optimum precision.

MX80LS Standard Series

• 5 g acceleration
• Repeatability to ±0.8 μm
• Straightness 6 μ
• Steel body construction
• Light weight aluminum body
• Low luster black anodize finish

Standard grade units offer a lower cost alternative for applications requiring high throughput performance with less demanding positioning requirements. They are constructed of high alloy aluminum, providing a lighter weight design which can accelerate to 5 g’s.

Model No: MX80LT01MP-D11H3L2CM05Z3E8R1A25X151, MX80LT02MP-D11H3L2CM05Z3E8R1A25X151, MX80LT03MP-D11H3L2CM05Z3E8R1A25X151, MX80LT04MP-D11H3L2CM05Z3E8R1A25X151