Nanomotion: Linear Stage (FBS075 Series)

Home > Nanomotion >

Alternate View

Standard and Vacuum Stages

Call for Pricing

Price Quote Form

Order #: FBS075

Environment:
Resolution:
Travel Range:

Description

Specifications and Drawings

Nanomotion: Linear Stage (FBS075 Series)

The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.

The FB075 family of stages is a 75mm wide slide assembly, utilizing Nanomotion’s HR8 motor. Standard travels of 40mm, 60mm, and 100mm are available with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor.

Mechanical Characteristics

Model	FBS075040	FBS075060	FBS075100
Stage Plate Material	Aluminum- Black Anodized
Motor	HR8 Piezo, ultrasonic standing wave
Bearing Type	Precision crossed rollers with anti-migration device
Encoder	Linear optical encoder with gold tape scale
Cable lengths (m)	3m
MTBF (hours)	30,000
Stage Mass	727g	918g	1062g
Carriage Moving Mass	284g	447g	445g
RoSH	Complaint
Vacuum Compatible Options	High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

Performance Specs

Model		FBS075040	FBS075060	FBS075100
Travel Range (mm)		40mm	60mm	100mm
Encoder Resolution	Standard	100nm
	Optional	10nm
Bi-directional Repeatability	Standard	1µm
	Optional	100nm
Absolute Accuracy (Error mapping available)	Standard	6µm	8µm	10µm
Absolute Accuracy (Error mapping available)	Optional	3µm	4µm	5µm
Minimum Incremental Move Convergence (encoder & control dependent)	AC Mode	100nm
	UHR Mode	5nm
	DC Mode	<1nm
Maximum Velocity		200mm/sec	250mm/sec	250mm/sec
Straightness & Flatness		±4µm	±5µm	±5µm
Pitch & Yaw		±40µrad	±60µrad	±60µrad
Load Capacity-Horizontal		3.0kg	3.0kg	3.0kg
Load Capacity-Vertical		0.8kg	0.65kg	0.65kg
Dynamic Stall Force		32N
Motor Stiffness		3N/µm
Holding force without power		28N