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Nanomotion: Linear Stage (FBS050 Series)
Nanomotion: Linear Stage (FBS050 Series)
 
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Standard and Vacuum Stages

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Order #: FBS050


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Description Specifications and Drawings
 

Nanomotion: Linear Stage (FBS050 Series)


The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.


Mechanical Characteristics

Model

FBS050020

FBS050050

Stage Plate Material

Aluminum- Black Anodized

Motor

HR4 Piezo, ultrasonic standing wave

Bearing Type

Precision crossed rollers with anti-migration device

Encoder

Linear optical encoder with gold tape scale

Cable lengths (m)

3m

MTBF (hours)

30,000

Stage Mass

405g

550g

Carriage Moving Mass

158g

230g

RoSH

Complaint

Vacuum Compatible Options

High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

  • 20mm travel with HR2 motor: 8N
  • 50mm travel with HR2 motor: 8N
  • 20mm travel with HR4 motor: 16N
  • 50mm travel with HR4 motor: 16N
  • 75mm travel with HR4 motor: 16N

Stage Mass (g):

  • 20mm travel with HR2 motor: 385
  • 20mm travel with HR4 motor: 400
  • 50mm travel with HR2 motor: 595
  • 50mm travel with HR4 motor: 610
  • 75mm travel with HR4 motor: 700

Moving Mass (g):

  • 20mm travel with HR2 motor: 150
  • 20mm travel with HR4 motor: 150
  • 50mm travel with HR2 motor: 226
  • 50mm travel with HR4 motor: 226
  • 75mm travel with HR4 motor: 400

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