High accuracy non-contact 2D encoder using image correlation

Simultaneous X-Y position measurements

Nanometer resolution

Easy alignment

Allows minute strain measurement and deflection measurement

Model: MICSYS-SA1

Order No.: 549-701A

Detection Method: Laser speckle image correlation

Resolution: 1nm

Repeatability (20Cº): 5nm (s)

Accuracy (20Cº): +/-100nm; Linearity: 80nm

Effective Range: ± 100µm (2D)

Interface: RS-232C

Data Update Period: 20Hz

Laser Wavelength: 650nm (Visible) Class 2

Operating temperature and humidity range: Detector: 15-25ºC, I/F unit: 0-40ºC, 20-80%RH (Non-condensing)

Storage temperature and humidity range: -10-50ºC / ~85%RH (Non-condensing)

Power Supply: AC100-240V 45W 50/60Hz