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Numerik Jena: Incremental Linear Encoder (Vacuum)
Numerik Jena: Incremental Linear Encoder (Vacuum)


 
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Numerik Jena: Vacuum Linear Incremental Encoder (LIK XX VAC & KIT LX VAC)


Our exposed linear encoders consist of a scanning head and a scale tape. These measuring systems are basically characterized by the following main features:

  • The users slide system takes over the steering between the scanning head and the scale tape

  • Non-contact optical scanning of the scale tape by the scanning head, thereby no mechanical retroactive effect on the slide system

  • Low space requirement and uncomplicated assembly

  • High traversing speed up to 10 m/s

  • Signal interpolation up to 100 times integrated in the measuring head or the connector and high resolution up to 50 nm

  • Large mounting tolerances

  • Automatic signal adjustment after mounting possible

  • High scale accuracy up to ±1 µm

  • High interpolation accuracy and low sensibility to contamination due to dynamic offset- and amplitude control

  • Reference signals with increment-precise repetitive accuracy independent to the reference marks’ approach

  • Defined thermal behaviour supported by our DOUBLEFLEX scale tapes


Typical fields of application:

  • Production and inspection machines for the semiconductor industry

  • Linear units and linear drives

  • Coordinate tables

  • Measuring machines and measuring microscopes

  • Robotics

  • Precision devices in reprography

  • Precise machining

  • Positioning and measuring devices in medical technology


Vacuum Encoder Features:

  • We offer you each of our linear measuring systems also in a modified vacuum version

  • Here we categorize vacuum applications up to 10-6 mBar (HV) and 10-9 mBar (UHV) of atmospheric pressure

  • Heating cycles of 12 h at 150 °C possible


LIK XX VAC Features:

The LIK Series was especially designed for applications with limited installation space. With its integrated 2-field EPIFLEX sensor module it is geared up for rougher applications also. The LIK 41 is the smallest variant of this series and was especially equipped with a 1-field sensor to minimize the size of the housing.

  • Special vacuum version of the LIK 21 with housing variant 1

  • Special vacuum version of the LIK 22 with housing variant 2

  • Special vacuum version of the LIK 23 with housing variant 3

  • Special vacuum version of the LIK 41 with EPIFLEX sensor module (1-field scanning)

  • With EPIFLEX sensor module (2-field scanning)

  • Components are vacuum compatible up to 10 E-9 mbar (UHV) atmospheric pressure

  • Heating cycles of 12 h at 150 °C possible

  • 1 Vpp or RS 422 output signal

  • Up to 100-times signal interpolation

  • Smallest measuring step 50 nm

  • Traversing speed up to 10 m/s (with 1 Vpp)


KIT LX VAC Features:

The Kit L Series was especially designed for applications with especially customized requirements. These systems are not only extremely small, they are also particularly configurable. Your ideas won't be hardly limited with this series.

  • Special vacuum version of the Kit L2 with EPIFLEX sensor module (2-field scanning)

  • Special vacuum version of the Kit L4 with EPIFLEX sensor module (1-field scanning)

  • With EPIFLEX sensor module (2-field scanning)

  • Components are vacuum compatible up to 10 E-6 mbar (UHV) atmospheric pressure

  • 1 Vpp or RS 422 output signal

  • Up to 100-times signal interpolation

  • Smallest measuring step 50 nm

  • Traversing speed up to 10 m/s (with 1 Vpp)


Stainless Steel Scales:

The SINGLEFLEX-scale tape consists of a single stainless steel tape with an applied incremental track and one or more reference marks or a PRC code. The scale tape is equipped with a double-sided adhesive tape and can be mounted easily on the machine element.


Glass Scales:

For applications with special environmental conditions (e.g. magnetic fields, heat sources, vacuum, etc.) or for special demands on the dimensions we also offer scales made of glass.


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